After eliminating the power failure of the air compressor, further check the operation of the air compressor: the air compressor was started up to three or four times in the past one morning, and now the air compressor is started once every 10 minutes. Accordingly, it is suspected that the pneumatic system leaks and the air compressor is frequently started. At this time, the electric mirror is not turned on, and the air compressor is turned on. When the air compressor pressure rises to 4.7×100 kPa, the air compressor automatically stops. After 10 minutes, the pressure gauge head reading of the air compressor does not drop, indicating that the air compressor and the air compressor are empty. The pipe between the press and the electromagnetic reversing valve of the electron microscope is intact; in addition, the machine is equipped with an image analysis processing system, and the movement of the collecting part is also driven by compressed air. The pipe of the pneumatic operating system is also connected to the electromagnetic of the electron microscope. Before the reversing valve line, the leakage of the pneumatic operating system is also excluded, and it also indicates that the electromagnetic reversing valve does not leak before it moves. Finally, each electromagnetic reversing valve is separately energized, and after 10 minutes, the value of the air pressure drop is observed to determine which electromagnetic reversing valve is leaking.
The specific method is as follows: (1) All parts of the electron microscope are deflated, so that the pressure of each part is balanced with atmospheric pressure. (2) Shut down and cut off the power. (3) Take a connector with the same size as the electromagnetic reversing valve power supply connector and connect it to the 24V regulated power supply. (4) Open the upper cover behind the lens barrel, unplug the SV2 valve, plug the power connector into the socket of the SV2, and turn on the 24V power supply. The red indicator above the valve is on, indicating that it is in operation. At this time, the pressure readings of the air compressor after the current and 10 minutes are recorded. (5) Restoring the SV2 plug, and repeating the above test, the result is unchanged, so it can be sure that the electromagnetic reversing valve leaks, and the SV3 and SV4 are most severely replaced. Since there is only one spare part, only the spare part is replaced with SV4. Considering that the function of SV18 is to control the cylinder lifting electron gun, it has few opportunities and is not synchronized with the operation of the electron microscope. For emergency use, SV3 and SV18 are reversed. After the change, the vacuum was re-evacuated on the electron microscope, and the number of starts of the compressor was found to be greatly reduced after trial. The electron microscope returned to normal operation.
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